The sputtering yield per cluster ion is higher than that for monomer ion by a factor of more than 98.
离化团束得溅射产额比之单体离子束高100倍以上。
The sputtering yield per cluster ion is higher than that for monomer ion by a factor of more than 100.
离化团束的溅射产额比之单体离子束高100倍以上。
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