At present, the pilot production of cryopump has been finished, the batch production will begin soon.
目前已完成低温泵得中试生产，开始批量生产。
Large calibre, the pumping speed cryopump.
大口径, 大抽速低温泵。
On the uncertainty of pumping speed for pumping performance test platform of cryopump
低温泵抽气性能测试平台的抽速测量不确定度研究
The condensation source of modern cryopump is a minirefrigerator.
现代低温泵的冷源是微型制冷机。
Measures taken to prevent abrasion of the plunger in cylinder sleeve of a cryopump and to improve sealing performance
低温泵缸套柱塞防磨损和提高密封性的措施
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